Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A. | 東京科学大学図書館　蔵書検索（大岡山図書館、すずかけ台図書館）

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Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A. / editors, Robert J. Nemanich ... [et. al.]

資料種別:: 図書
出版情報:: Pittsburgh, Pa. : Materials Research Society, c1992
形態:: xiii, 529 p. ; 24 cm
シリーズ名:: Materials Research Society symposium proceedings ; v. 259 <BA00013775>
著者名:: Nemanich, R. J. (Robert J.) <DA02188561>
ISBN:: 9781558991545 [1558991549]
書誌ID:: BA19373448

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注記:	Includes bibliographical references and indexes
主題:	Crystal growth--Congresses; Semiconductors--Congresses; Surface preparation--Congresses
言語:	英語

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