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Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing / editors, Richard E. Novak, Jerzy Ruzyllo ; [sponsored by the Electrochemical Society] Electronics Divisions

資料種別:

図書

出版情報:

Pennington, NJ : The Electrochemical Society, c1996

形態:

xii, 626 p. ; 23 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 95-20 <BA01323290>

著者名:

ISBN:

9781566771153 [1566771153]

書誌ID:

BA28544359

子書誌情報

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書誌詳細

注記:	Includes bibliographies and index "held during the Fall Electrochemical Society meeting in Chicago, Illinois, October 1995"
言語:	英語

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