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Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A. / editors, Terrence J. Riley ... [et al.]

資料種別:
図書
出版情報:
Pittsburgh, PA : Materials Research Society, c1997
形態:
ix, 434 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 470 <BA00013775>
著者名:
Riley Terrence J.  
ISBN:
9781558993747 [1558993746]
書誌ID:
BA3573538X
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