Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A. / editors: S.V. Babu ... [et al.]
- 資料種別:
- 図書
- 出版情報:
- Warrendale, PA : Materials Research Society, c2000
- 形態:
- ix, 281 p. ; 24 cm
- シリーズ名:
- Materials Research Society symposium proceedings ; v. 566 <BA00013775>
- 著者名:
- ISBN:
- 9781558994737 [1558994734]
- 書誌ID:
- BA46033861
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