Preface |
Acknowledgments |
Materials Research Society Symposium Proceedings |
Processing of Pb-Based Ferroelectrics |
Low Temperature Preparation of High-Quality Pb(Zr, Ti)O[subscript 3] Films by Metal Organic Chemical Vapor Deposition With High Reproducibility / Hiroshi Funakubo ; Kuniharu Nagashima ; Masanori Aratani ; Kouji Tokita ; Takahiro Oikawa ; Tomohiko Ozeki ; Gouji Asano ; Keisuke Saito |
Role of Fluorite Formation in Orientation Selection in Sol-Gel Derived Pb(Zr, Ti)O[subscript 3] Films on Pt Electrode Layers / G.J. Norga ; L. Fe ; F. Vasiliu ; D.J. Wouters ; O. Van der Biest |
Precise Control of Nucleation and Growth in Lead Zirconate Titanate Thin Films by Scanning Rapid Thermal Annealing / Jang-Sik Lee ; Seung-Ki Joo |
Low-Temperature Crystallization of Pb(Zr[subscript 0.4], Ti[subscript 0.6])O[subscript 3] Thin Films by Chemical Solution Deposition / Kazunari Maki ; Nobuyuki Soyama ; Kaoru Nagamine ; Satoru Mori ; Katsumi Ogi |
Processing of Bi-Based Ferroelectrics |
Heteroepitaxial Growth of (1, 0, m+1) One Axis-Oriented Bismuth Layered Structured Ferroelectrics Thin Films Directly Crystallized by MOCVD / Norimasa Nukaga ; Takayuki Watanabe ; Tomohiro Sakai ; Toshimasa Suzuki ; Yuji Nishi ; Masayuki Fujimoto |
Fabrication of V-Substituted (Bi,M)[subscript 4]Ti[subscript 3]O[subscript 12] [M = Lanthanoids] Thin Films by Chemical Solution Deposition Method / H. Uchida ; H. Yoshikawa ; I. Okada ; H. Matsuda ; T. Iijima ; T. Watanabe ; H. Funakubo |
Ferroelectric Nonvolatile Memories--Technology, Fundamentals, and Integration |
Imprint in Ferroelectric Thin Films Caused by Screening of an Electric Field in a Thin Surface Layer / Michael Grossmann ; Oliver Lohse ; Dierk Bolten ; Ulrich Boettger ; Rainer Waser |
Iridium Based Electrodes for Ferroelectric Capacitor Fabrication / J.A. Johnson ; J.G. Lisoni |
Poster Session |
Ferroelectric-Gate Structures and Field-Effect Transistors Using (Bi,La)[subscript 4]Ti[subscript 3]O[subscript 12] Films / Eisuke Tokumitsu ; Takuya Suzuki ; Naoki Sugita |
Crystallization Behavior and Ferroelectric Properties of YMnO[subscript 3] Thin Films on Si (100) Substrates / Dong Chul Yoo ; Jeong Yong Lee ; Ik Soo Kim ; Yong Tae Kim |
Characteristics of Memory Window and Retention Properties of One Transistor Memory Devices / Tingkai Li ; Sheng Teng Hsu ; Bruce Ulrich ; Dave Evans |
Structural Inhomogeneity of SrBi[subscript 2]Ta[subscript 2]O[subscript 9] Thin Films Prepared by Layer-by-Layer Technique / J.B. Xu ; G.D. Hu ; S. P. Wong |
Crystallization Kinetics of Seeded SBT (Sr[subscript 0.7]Bi[subscript 2.4]Ta[subscript 2]O[subscript 9]) Powders From Sol-Gel Derived Precursors / Gopinathan M.A. Kumar ; Woo-Chul Kwak ; Se-Yon Jung ; Seung-Joon Hwang ; Yun-Mo Sung |
Origin of Lowered Crystallization Temperature in SBT-BTT Ferroelectric Thin Films |
Effect of Bottom Electrodes on Structural and Electrical Properties of Laser Ablated SiBi[subscript 2]Ta[subscript 2]O[subscript 9] Thin Films / Rasmi R. Das ; W. Perez ; P. Bhattacharya ; Ram S. Katiyar |
Synthesis and Ferroelectric Properties of Sr- and Nb-codoped Bi[subscript 4-x]Sr[subscript x]Ti[subscript 3-x]Nb[subscript x]O[subscript 12] Thin Films by Sol-Gel Method / Hirofumi Matsuda ; Takashi Iijima ; Hiroshi Uchida ; Isao Okada |
Effect of Capacitor Configuration on Oxygen-Dependent Electrical Properties of Ferroelectric Pb(Zr,Ti)O[subscript 3] Thin Films / M.A. McCormick ; E.B. Slamovich ; P. Metcalf ; M. McElfresh |
Improvement of Surface Crystalline Quality of an Epitaxial (100)ZrN Film as a Bottom Electrode Diffusion Barrier for Ferroelectric Capacitors / Susumu Horita ; Sadayoshi Horii ; Takeo Toda |
Characterization of (Ba,Sr)RuO[subscript 3] Films Deposited by Metal-Organic Chemical Vapor Deposition / Duck-Kyun Choi ; Joong-Seo Kang ; Young-Bae Kim ; Duck-Hwa Hong ; Hyun-Chul Kim ; Sung-Tae Kim ; Cha-Young Yoo |
Integration and Electrodes |
Investigation of the Role of Carbonylchemistry to Pattern Platinum Electrodes / St. Schneider ; H. Kohlstedt ; R. Waser |
Thermal Stability and Electrical Properties of RhO[subscript 2] Thin Films / Yoshio Abe ; Kiyohiko Kato ; Midori Kawamura ; Katsutaka Sasaki |
Fabrication and Characterization of a PZT Thin Film Actuator for a Micro Electromechanical Switch Application / Marcus Hoffmann ; Timm Leuerer ; Clemens Kruger ; Ulrich Bottger ; Wilfried Mokwa |
Epitaxial Ferroelectric Films |
Preparation and Characterization of a- and b-Axis-Oriented Epitaxially Grown Bi[subscript 4]Ti[subscript 3]O[subscript 12]-Based Thin Films on Rutile-Type Oxides / Minoru Osada |
Size Effects on Polarization in Epitaxial Ferroelectric Films and the Concept of Ferroelectric Tunnel Junctions Including First Results / N.A. Pertsev |
Functional Behavior of Thin Film Dielectric Superlattices / J.M. Gregg ; M.H. Corbett ; D. O'Neill ; G. Catalan ; R.M. Bowman |
PZT and PMN-PT Thin Film Cantilevers: Comparison Between Monomorph and Bimorph Structures / Carsten Kugeler |
High-Temperature Dielectric Properties of Sol-Gel Derived Thick PZT Thin Films With Different Zr/Ti Atom Ratios / Jinrong Cheng ; Wenyi Zhu ; Nan Li ; L. Eric Cross |
Interdigital Ag(Ta,Nb)O[subscript 3] Thin Film Capacitors on Sapphire / Jung-Hyuk Koh ; Alex Grishin ; Akira Shibuya ; Masanori Okuyama |
RF-Magnetron Sputtered Au/(Na,K)NbO[subscript 3]/SiO[subscript 2]/Si MFIS-Diode Structures / Veronika Kugler ; Denis Music ; Ulf Helmersson |
Process Induced Modification of the High Frequency Dielectric Behavior of (100) Textured Ba[subscript x]Sr[subscript 1-x]TiO[subscript 3] (x = 0.5 and 0.6) Thin Films / S.B. Majumder ; M. Jain ; A. Martinez ; R.S. Katiyar ; E.R. Fachini ; F.W. Van Keuls ; F.A. Miranda ; P.K. Sahoo ; V.N. Kulkarni |
Reactive Coevaporation of SrTiO[subscript 3] Thin Films for Tunable Microwave Devices / Luke S.-J. Peng ; Nina F. Heinig ; Brian H. Moeckly |
Microwave Properties of Strontium Barium Niobate Thin Films Grown by Pulsed Laser Deposition / Victor Rodriguez-Santiago ; Yelitza Gonzalez ; Felix E. Fernandez ; Carl H. Mueller ; Fred W. Van Keuls ; Felix A. Miranda |
Pyroelectric Properties of Alanine Doped TGS Single Crystalline Thick Films Under Constant Electric Stress / Lucian Pintilie ; Ion Matei ; Ioana Pintilie ; Horia V. Alexandru ; Ciceron Berbecaru |
Infrared Spectroscopy of Epitaxial Antimony Sulpho Iodide Thin Films / S. Kotru ; S. Surthi ; R.K. Pandey ; D. Donnelly |
Direct Nanoscale Observation of Size Effect on Polarization Instability in Pb(Zr,Ti)O[subscript 3] Film Capacitors / Igor Stolichnov ; Enrico Colla ; Alexander Tagantsev ; Seungbum Hong ; Nava Setter ; Jeffrey S. Cross ; Mineharu Tsukada |
Analysis of Alternating Current Conduction and Impedance Spectroscopy Study of BaBi[subscript 2]Nb[subscript 2]O[subscript 9] Thin Films / Apurba Laha ; S. Saha ; S.B. Krupanidhi |
Simulation of the Variability in Next-Generation Microelectronic Capacitors With Polycrystalline Dielectrics / Jesse L. Cousins ; David E. Kotecki |
Crystallization of BaTiO[subscript 3] Thin Films Prepared by Metalorganic Decomposition With Hydrothermal Treatment at 140[degree]C / Zhiqiang Wei ; Minoru Noda |
Impact of Template Layers on Dielectric and Electrical Properties of Pulsed-Laser Ablated Pb(Mg[subscript 1/3]Nb[subscript 2/3])O[subscript 3]-PbTiO[subscript 3] Thin Films |
Microstructural and Dielectrical Properties for Ceramics and Thin Films of the xPbTiO[subscript 3]-(1-x)SrTiO[subscript 3] Solid Solution / E. Martinez ; A. Fundora ; O. Blanco ; S. Garcia ; E. Heredia ; J.M. Siqueiros |
Compositional Disorder Induced Relaxor Behavior of (PbLa)TiO[subscript 3] Thin Films / S. Bhaskar |
Ferroelectic BaTiO[subscript 3] Thin Film Optical Waveguide Modulators / A. Petraru ; M. Siegert ; M. Schmid ; J. Schubert ; Ch. Buchal |
Initial Growth Stages of Epitaxial BaTiO[subscript 3] Films on Vicinal SrTiO[subscript 3]:Nb (001) Substrates / A. Visinoiu ; M. Alexe ; H.N. Lee ; D.N. Zakharov ; A. Pignolet ; D. Hesse ; U. Gosele |
Structure and Morphology of Epitaxially Intergrown (100)-and (116)-Oriented SrBi[subscript 2]Ta[subscript 2]O[subscript 9] Ferroelectric Thin Films on SrLaGaO[subscript 4](110) Substrates / P. Reiche ; R. Uecker |
Fabrication and Properties of Epitaxial Lithium Niobate Thin Films by Combustion Chemical Vapor Deposition (CCVD) / Yong Dong Jiang ; Jake McGee ; Todd A. Polley ; Robert E. Schwerzel ; Andrew T. Hunt |
Structural and Ferroelectric Properties of Epitaxial PbZr[subscript 0.52]Ti[subscript 0.48]O[subscript 3] and BaTiO[subscript 3] Thin Films Prepared on SrRuO[subscript 3]/SrTiO[subscript 3](100) Substrates / J. Rodriguez Contreras ; U. Poppe ; O. Trithaveesak ; K. Szot |
Growth and Electrical Properties of Fe doped (Ba,Sr)TiO[subscript 3] Thin Films Deposited by Pulsed Laser Deposition / Yoshiyuki Yonezawa ; Megumi Kato ; Yoshinori Konishi ; Shizuyasu Yoshida ; Nobuhiro Okuda ; Takahiko Maeda ; Ryohei Tanuma ; Michio Ohsawa|cHideaki Matsuyama ; Shinji Ogino ; Naoto Fujishima ; Akinori Matsuda ; Noboru Furusyo ; Toyohiro Chikyow ; Masashi Kawasaki ; Hideomi Koinuma |
Domains and Nanostructures |
Local Polarization, Charge Compensation, and Chemical Interactions on Ferroelectric Surfaces: A Route Toward New Nanostructures / Dawn A. Bonnell ; Sergei V. Kalinin |
Higher Order Nonlinear Dielectric Microscopy / Yasuo Cho ; Koya Ohara |
Piezoelectrics and Pyroelectrics |
Dielectric and Electromechanical Behavior of Relaxor [(1-x)Pb(Mg[subscript 1/3]Nb[subscript 2/3])O[subscript 3]-xPbTiO[subscript 3] Thin Films / N.J. Donnelly ; C. Morros |
Ferroelectric and Displacement Properties of Lead Zirconate Titanate Thick Films Prepared by Chemical Solution Deposition Process / Yoshinori Hayashi ; Jun Onagawa |
Compositional Effects on the Piezoelectric and Ferroelectric Properties of Chemical Solution Deposited PZT Thin Films / Dong-Joo Kim ; Jon-Paul Maria ; Angus I. Kingon |
Micro-Machined Pyroelectric Infrared Detector Based on Sol-Gel Derived Pb(Zr[subscript 0.3]Ti[subscript 0.7])O[subscript 3]/PbTiO[subscript 3] Multilayer Thin Films / Ling Ling Sun ; Wei Guo Liu ; Ooi Kiang Tan ; Wei Guang Zhu |
Ferroelectric Gates |
Epitaxial Growth of LaVO[subscript 3]/(Ba,Sr)TiO[subscript 3]/(Pb,La)(Zr,Ti)O[subscript 3]/(La,Sr)CoO[subscript 3] Semiconductor/Ferroelectric/Conductor Heterostructures / Woong Choi ; Tim Sands |
Integration Processes and Properties of Pt/Pb[subscript 5]Ge[subscript 3]O[subscript 11]/(Zr,Hf)O[subscript 2]/Si One Transistor Memory Devices / Lisa Stecker |
Al[subscript 2]O[subscript 3]/Si[subscript 3]N[subscript 4] Buffer Layer for High Performance MFIS (Metal-Ferroelectric-Insulator-Semiconductor) Transistors / Yoshihisa Fujisaki ; Hiroshi Ishiwara |
A Study of Charge Control and Gate Tunneling in a Ferroelectric-Oxide-Silicon Field Effect Transistor / Yih-Yin Lin ; Yifei Zhang ; Jasprit Singh |
Thin Films for RF Applications |
Raman Studies of the Soft Phonon Modes in Ba[subscript x]Sr[subscript 1-x]TiO[subscript 3] Thin Films / D.A. Tenne ; A.M. Clark ; A.R. James ; A. Soukiassian ; K. Chen ; X.X. Xi |
High-Permittivity Materials |
Probing the Dead Layer in Barium Strontium Titanate Capacitors Made by Pulsed Laser Deposition / L.J. Sinnamon |
Thickness Dependence of Leakage Current Behavior in Epitaxial (Ba,Sr)TiO[subscript 3] Thin Films / Kun Ho Ahn ; Sang Sub Kim ; Sunggi Baik |
Symposium K Paper |
Erbium-Doped Barium Titanate Thin Film Waveguides For Integrated Optical Amplifiers / Andrew R. Teren ; Seong-Soo Kim ; Seng-Tiong Ho ; Bruce W. Wessels |
Author Index |
Subject Index |
Preface |
Acknowledgments |
Materials Research Society Symposium Proceedings |
Processing of Pb-Based Ferroelectrics |
Low Temperature Preparation of High-Quality Pb(Zr, Ti)O[subscript 3] Films by Metal Organic Chemical Vapor Deposition With High Reproducibility / Hiroshi Funakubo ; Kuniharu Nagashima ; Masanori Aratani ; Kouji Tokita ; Takahiro Oikawa ; Tomohiko Ozeki ; Gouji Asano ; Keisuke Saito |
Role of Fluorite Formation in Orientation Selection in Sol-Gel Derived Pb(Zr, Ti)O[subscript 3] Films on Pt Electrode Layers / G.J. Norga ; L. Fe ; F. Vasiliu ; D.J. Wouters ; O. Van der Biest |