Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology / editors, H.R. Huff, L. Fabry, S. Kishino ; sponsoring division, Electronics
- 資料種別:
- 図書
- 出版情報:
- Pennington, NJ : The Electrochemical Society, c2002
- 形態:
- 2 v. (xx, 1074 p.) ; 24 cm
- シリーズ名:
- Proceedings / [Electrochemical Society] ; v. 2002-2 <BA01323290>
- 著者名:
- ISBN:
- 9781566773744 [1566773741] (: set)
9781566773683 [1566773687] (v. 1)
9781566773737 [1566773733] (v. 2) - 書誌ID:
- BA60982595
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図書
Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
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