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Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays : 8-9 August 1996, Denver, Colorado / John C. Stover, chair/editor

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE-The International Society for Optical Engineering, c1996
形態:
vii, 188 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2862 <BA0022700X>
著者名:
ISBN:
9780819422507 [0819422509]
書誌ID:
BA79658118
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