Cleaning Technology in Semiconductor Device Manufacturing IX | 東京科学大学図書館　蔵書検索（大岡山図書館、すずかけ台図書館）

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Cleaning Technology in Semiconductor Device Manufacturing IX / editors, J. Ruzyllo ... [et al.] ; sponsoring divisions, Electronics and Photonics, Dielectric Science and Technology

資料種別:

図書

出版情報:

Pennington, NJ : Electrochemical Society, c2005

形態:

xi, 379 p. ; 24 cm

シリーズ名:

ECS transactions ; vol. 1, no. 3 <BA78566502>

著者名:

ISBN:

9781566774291 [1566774292]

書誌ID:

BA81681826

子書誌情報

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書誌詳細

注記:	"... held during the Fall Meeting of the Electrochemical Society in Los Angeles, California in October 2005." -- on pref. Includes bibliographical references and indexes
言語:	英語

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