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Functional thin film deposition by atmospheric pressure cold plasma / Hyun-Kwon Ha (ハー ヒョンクン)

資料種別:
学位論文
出版情報:
Tokyo Institute of Technology, 1996
著者名:
Hyun-Kwon Ha (ハー ヒョンクン)  
書誌ID:
1000294644
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