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IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council / Institute of Electrical and Electronics Engineers

資料種別:
雑誌
背文字タイトル:
IEEE Transactions on Semiconductor Manufacturing
出版情報:
New York, N.Y. : Institute of Electrical and Electronics Engineers, c1988-
巻次年月次:
Vol. 1, no. 1 (Feb. 1988)-
ISSN:
08946507
書誌ID:
AA10690454
子書誌情報
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