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Journal of microlithography, microfabrication, and microsystems / Society of Photo-optical Instrumentation Engineers

資料種別:
雑誌
背文字タイトル:
Journal of Microlithography, Microfabrication, and Microsystems
出版情報:
Bellingham, Wash. : SPIE-The International Society for Optical Engineering, c2002-c2006
形態:
v. ; 29 cm
巻次年月次:
Vol. 1, no. 1 (Apr. 2002)-v. 5, no. 4 (Oct./Dec. 2006)
継続後誌:
Journal of micro/nanolithography, MEMS, and MOEMS <AA12228464>
ISSN:
15371646
書誌ID:
AA11820293
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