Journal of microlithography, microfabrication, and microsystems / Society of Photo-optical Instrumentation Engineers

資料種別:

雑誌

背文字タイトル:

Journal of Microlithography, Microfabrication, and Microsystems

出版情報:

Bellingham, Wash. : SPIE-The International Society for Optical Engineering, c2002-c2006

形態:

v. ; 29 cm

巻次年月次:

Vol. 1, no. 1 (Apr. 2002)-v. 5, no. 4 (Oct./Dec. 2006)

継続後誌:

Journal of micro/nanolithography, MEMS, and MOEMS <AA12228464>

ISSN:

15371646

書誌ID:

AA11820293