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Glow discharge processes : sputtering and plasma etching / Brian Chapman

資料種別:
図書
出版情報:
New York : Wiley, c1980
形態:
xv, 406 p. ; 24 cm
シリーズ名:
A Wiley-Interscience publication <BA00493885>
著者名:
Chapman, Brian N. <DA00387104>  
ISBN:
9780471078289 [047107828X]
書誌ID:
BA00536398
子書誌情報
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