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Materials for microlithography : radiation-sensitive polymers / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984

資料種別:

図書

出版情報:

Washington, D.C. : The Society, 1984

形態:

viii, 494 p. ; 24 cm

シリーズ名:

ACS symposium series ; 266 <BA00073096>

著者名:

Thompson, L. F., 1944- <DA02745817>

Willson, C. G. (C. Grant), 1939- <DA02745828>

Fréchet, J. M. J. <DA03807385>

American Chemical Society. Division of Polymeric Materials : Science and Engineering <DA00125924>

American Chemical Society. Division of Polymer Chemistry <DA00033688>

American Chemical Society. Meeting (187th : 1984 : St. Louis, Mo.)

さらに 1 件

ISBN:

9780841208711 [0841208719]

書誌ID:

BA03230678

子書誌情報

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書誌詳細

その他の標題:	Radiation-sensitive polymers
注記:	Includes bibliographies and indexes
主題:	Microelectronics--Materials--Congresses; Microlithography--Materials--Congresses; Photoresists--Congresses; Polymers and polymerization--Congresses
言語:	英語

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