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Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, Richard B. Fair, Charles W. Pearce, Jack Washburn

資料種別:
図書
出版情報:
Pittsburgh, Pa. : Materials Research Society, c1985
形態:
xiii, 284 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 36 <BA00013775>
著者名:
Fair, Richard B. <DA02345783>
Pearce, Charles W. <DA02482649>
Washburn, Jack, 1921- <DA02482693>
Symposium on Impurity Diffusion and Gettering in Semiconductors <DA02482773>
Materials Research Society. Meeting <DA00721013>
Materials Research Society <DA00024949>
さらに 1 件
ISBN:
9780931837012 [0931837014]
書誌ID:
BA03262776
子書誌情報
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