Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. | 東京工業大学附属図書館蔵書検索

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Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. / editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg

資料種別:

図書

出版情報:

New York : North-Holland, c1983

形態:

xiii, 298 p. ; 24 cm

シリーズ名:

Materials Research Society symposium proceedings ; v. 17 <BA00013775>

著者名:

ISBN:

9780444007827 [0444007822]

書誌ID:

BA03265606

子書誌情報

フルテキスト

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書誌詳細

注記:	"Sponsored by the Air Force Office of Scientific Research"--T.p. verso Includes bibliographical references and indexes
主題:	Lasers--Industrial applications--Congresses; Semiconductors--Congresses
言語:	英語

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