Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. | 東京工業大学附属図書館蔵書検索

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Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, R.P.H. Chang, B. Abeles

資料種別:

図書

出版情報:

Pittsburgh, Pa. : Materials Research Society, c1985

形態:

xv, 522 p. ; 24 cm

シリーズ名:

Materials Research Society symposium proceedings ; v. 38 <BA00013775>

著者名:

ISBN:

9780931837036 [0931837030]

書誌ID:

BA03290705

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注記:	Papers presented at the Symposium on Plasma Synthesis and Etching of Electronic Materials held in Boston, Mass. on Nov. 27-30, 1984 Includes bibliographies and indexes
主題:	Electronics--Materials--Congresses; Plasma engineering--Congresses; Plasma etching--Congresses
言語:	英語

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