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Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, R.P.H. Chang, B. Abeles

資料種別:
図書
出版情報:
Pittsburgh, Pa. : Materials Research Society, c1985
形態:
xv, 522 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 38 <BA00013775>
著者名:
ISBN:
9780931837036 [0931837030]
書誌ID:
BA03290705
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