Tungsten and other refractory metals for VLSI applications IV : proceedings of the 1988 workshop held October 4-6, 1988, Albuquerque, New Mexico, U.S.A. / sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley and Sandia National Laboratories, Albuquerque, New Mexico ; editors, Robert S. Blewer, Carol M. McConica ; associate editors, Kie Y. Ahn ...[et al]

資料種別:

図書

出版情報:

Pittsburgh, Pa : Materials Research Society, c1989

形態:

xv, 373 p. ; 24 cm

シリーズ名:

Materials Research Society conference proceedings <BA07468230>

著者名:

• Workshop on Tungsten and Other Refractory Metals for VLSI Applications IV
• Blewer, R. S. <DA03800546>
• McConica, Carol M.
• Ahn, Kie Y.
• Materials Research Society

ISBN:

9780931837982 [0931837987]

書誌ID:

BA07603380