Semiconductor fabrication : technology and metrology | 東京工業大学附属図書館蔵書検索

>> Google Books

所蔵情報QRコード

Semiconductor fabrication : technology and metrology / Dinesh C. Gupta, editor

資料種別:

図書

出版情報:

Philadelphia, PA : ASTM, c1989

形態:

476 p. ; 24 cm

シリーズ名:

ASTM special technical publication ; 990 <BA00068096>

著者名:

ISBN:

9780803112735 [0803112734]

書誌ID:

BA07637305

子書誌情報

フルテキスト

Loading contents information

所蔵情報

Loading availability information

他の版・巻

書誌詳細

注記:	Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials International Includes bibliographies and indexes "ASTM publication code number (PCN) 04-990000-46"--T.p. verso
主題:	Semiconductors--Design and construction--Congresses
言語:	英語

東工大ブックレビュー

Loading review information

類似資料:

1 図書 Emerging semiconductor technology : a symposium Gupta, D. C. (Dinesh C.), Langer, Paul H., ASTM Committee F-1 on Electronics, International Symposium on Semiconductor … American Society for Testing and Materials	7 図書 Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing, Meyyappan, M., … Electrochemical Society
2 図書 Semiconductor processing : a symposium Gupta, D. C. (Dinesh C.), ASTM Committee F-1 on Electronics, Symposium on Semiconductor Processing ASTM	8 図書 Process and materials characterization and diagnostics in IC manufacturing : 27-28 February 2003, Santa Clara, California, USA Tobin, Kenneth W., Emami, Iraj, Society of Photo-optical Instrumentation Engineers SPIE
3 図書 Twenty fourth IEEE/CPMT International Electronics Manufacturing Technology Symposium, October 18-19, 1999, Austin, Tex. U.S.A./ sponsored by Semiconductor … (: soft. ; : case. ; : microfiche) IEEE/CPMT International Electronics Manufacturing Technology Symposium IEEE Service Center	9 図書 Twenty second IEEE/CPMT International Electronics Manufacturing Technology Symposium : IEMT-Europe 1998 : electronics manufacturing and development for … (: soft. ; : case.) IEEE/CPMT International Electronics Manufacturing Technology Symposium IEEE Service Center
4 図書 Silicon processing : a symposium / sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., … Gupta, D. C. (Dinesh C.), ASTM Committee F-1 on Electronics, United States. National Bureau of Standards, Stanford … ASTM	10 図書 IEEE/SEMI International Semiconductor Manufacturing Science Symposium : Burlingame, CA, USA, May 21-23. 1990 IEEE/SEMI International Semiconductor Manufacturing Science Symposium (2nd : 1990 : Burlingame, Calif.), Semiconductor … Institute of Electrical and Electronics Engineers, Additional copies may be purchased from IEEE Service Center
5 図書 Twenty sixth IEEE/CPMT International Electronics Manufacturing Technology Symposium, October 2-3, 2000, Santa Clara, CA USA (: soft. ; : case.) IEEE/CPMT International Electronics Manufacturing Technology Symposium IEEE Service Center	11 図書 Twenty third IEEE/CPMT International Electronics Manufacturing Technology Symposium, October 19-21, 1998, Austin, TX USA (: soft. ; : case.) IEEE/CPMT International Electronics Manufacturing Technology Symposium IEEE Service Center
6 図書 IEEE/CPMT/SEMI 29th International Electronics Manufacturing Technology Symposium : July 14-16, 2004, the Marriott Hotel, San Jose, CA, U.S.A. IEEE/CPMT/SEMI International Electronics Manufacturing Technology Symposium (29th : 2004 : San Jose, Calif.), … IEEE	12 図書 In-line methods and monitors for process and yield improvement : 22-23 September 1999, Santa Clara, California Ajuria, Sergio, Jakubczak, Jerome Florian, Society of Photo-optical Instrumentation Engineers, Electrochemical Society SPIE

1

2

3

4

5

6

7

8

9

10

11

12