Integrated circuit metrology, inspection, and process control II : 29 February-1 March 1988, Santa Clara, California | 東京科学大学図書館　蔵書検索（大岡山図書館、すずかけ台図書館）

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Integrated circuit metrology, inspection, and process control II : 29 February-1 March 1988, Santa Clara, California / Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c1988

形態:

viii, 458 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 921 <BA0022700X>

著者名:

ISBN:

9780892529568 [0892529563]

書誌ID:

BA07915612

子書誌情報

フルテキスト

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所蔵情報

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他の版・巻

書誌詳細

注記:	Includes bibliographies and index
主題:	Integrated circuits--Inspection--Congresses; Integrated circuits--Measurement--Congresses
言語:	英語

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