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Plasma-surface interactions and processing of materials / edited by Orland Auciello ... [et al.]

資料種別:

図書

出版情報:

Dordrecht ; Boston : Kluwer Academic Publishers, c1990

形態:

xiii, 557 p. ; 25 cm

シリーズ名:

NATO ASI series ; ser. E . Applied sciences ; no. 176 <BA00020624>

著者名:

ISBN:

9780792305842 [0792305841]

書誌ID:

BA10180092

子書誌情報

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書誌詳細

注記:	"Proceedings of the NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials, Alicante, Spain, September 4-16, 1988"--T.p. verso
主題:	Materials--Effect of radiation on--Congresses; Materials--Surfaces--Congresses; Microelectronics--Materials--Effect of radiation on--Congresses; Plasma etching--Congresses
言語:	英語

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