Spectroscopic characterization techniques for semiconductor technology III : 14-15 March 1988, Newport Beach, California / Orest J. Glembocki, Fred H. Pollak, Fernando Ponce, chairs/editors ; sponsored by Optical Society of America, SPIE--the International Society for Optical Engineering ; cooperating organization, the Metallurgical Society
- 資料種別:
- 図書
- 出版情報:
- Bellingham, Wash., U.S.A. : The Society, c1988
- 形態:
- viii, 234 p. ; 28 cm
- シリーズ名:
- Proceedings / SPIE -- the International Society for Optical Engineering ; v. 946 <BA0022700X>
- 著者名:
- ISBN:
- 9780892529810 [0892529814]
- 書誌ID:
- BA10254803
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