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Spectroscopic characterization techniques for semiconductor technology III : 14-15 March 1988, Newport Beach, California / Orest J. Glembocki, Fred H. Pollak, Fernando Ponce, chairs/editors ; sponsored by Optical Society of America, SPIE--the International Society for Optical Engineering ; cooperating organization, the Metallurgical Society

資料種別:
図書
出版情報:
Bellingham, Wash., U.S.A. : The Society, c1988
形態:
viii, 234 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 946 <BA0022700X>
著者名:
Glembocki, Orest J. <DA05870178>
Pollak, Fred H. <DA0587019X>
Ponce, Fernando A. <DA03833079>
Optical Society of America <DA00534515>
Society of Photo-optical Instrumentation Engineers <DA00848546>
Metallurgical Society (U.S.) <DA02608725>
さらに 1 件
ISBN:
9780892529810 [0892529814]
書誌ID:
BA10254803
子書誌情報
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