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Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and robots : proceedings / IEEE

資料種別:
図書
出版情報:
New York, NY : IEEE, c1990
形態:
xiii, 226 p. ; 28 cm
著者名:
IEEE Workshop on Micro Electro Mechanical Systems <DA04552610>  
書誌ID:
BA10650979
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