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In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. / editors, Anthony F. Bernhardt, Jerry G. Black, Robert Rosenberg

資料種別:
図書
出版情報:
Pittsburgh, Pa. : Materials Research Society, c1990
形態:
xi, 496 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 158 <BA00013775>
著者名:
ISBN:
9781558990463 [1558990461]
書誌ID:
BA10860020
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