IEEE/SEMI International Semiconductor Manufacturing Science Symposium : Burlingame, CA, USA, May 21-23. 1990

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IEEE/SEMI International Semiconductor Manufacturing Science Symposium : Burlingame, CA, USA, May 21-23. 1990 / [sponsored by Semiconductor Equipment and Materials International ... [et al.]]

資料種別:

図書

出版情報:

New York, NY, U.S.A. : Institute of Electrical and Electronics Engineers
Piscataway, NJ, USA : Additional copies may be purchased from IEEE Service Center, c1990

形態:

vi, 152 p. ; 28 cm

著者名:

書誌ID:

BA10862875

子書誌情報

フルテキスト

所蔵情報

他の版・巻

書誌詳細

その他の標題:	ISMSS '90 proceedings 90CH2810-0
注記:	Spine title: ISMSS '90 proceedings "Theme: 'Manufacturing science'" Includes bibliographical references "IEEE catalog number 90CH2810-0"--T.p. verso
主題:	Computer integrated manufacturing systems--Congresses; Electronic industries--Congresses; Semiconductors--Design and construction--Congresses
言語:	英語

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