所蔵情報QRコード
Tungsten and other advanced metals for VLSI/ULSI application V : proceedings of the 1989 workshop held September 20-21, 1989, San Mateo, California, U.S.A. / editors, S. Simon Wong, Seijiro Furukawa ; associate editors, Roc Blumenthal ... [et al.] ; sponsored by Continuing Education in Engineering, University Extension, University of Calfornia, Berkeley, and October 19-20, 1989, Tokyo, Japan, sponsored by the Japan Society of Applied Physics
- 資料種別:
- 図書
- 出版情報:
- Pittsburgh, Pa : Materials Research Society, c1990
- 形態:
- xvi, 427 p. ; 24 cm
- シリーズ名:
- Materials Research Society conference proceedings <BA07468230>
- 著者名:
- 分担著者名:
- 古川, 静二郎
- ISBN:
- 9781558990685 [1558990682]
- 書誌ID:
- BA10979941
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