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Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. / editors, Theodore M. Besmann, Bernard M. Gallois

資料種別:
図書
出版情報:
Pittsburgh, Pa. : Materials Research Society, c1990
形態:
xiii, 399 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 168 <BA00013775>
著者名:
ISBN:
9781558990562 [1558990569]
書誌ID:
BA11046470
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