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Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A. / editors, Avishay Katz, Shyam P. Murarka, Ami Appelbaum

資料種別:
図書
出版情報:
Pittsburgh, Pa. : Materials Research Society, c1990
形態:
xv, 633 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 181 <BA00013775>
著者名:
ISBN:
9781558990708 [1558990704]
書誌ID:
BA11202838
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