Materials and processes for microelectronic systems | 東京科学大学図書館　蔵書検索（大岡山図書館、すずかけ台図書館）

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Materials and processes for microelectronic systems / edited by K.M. Nair, R. Pohanka, R.C. Buchanan

資料種別:

図書

出版情報:

Westerville, Ohio : American Ceramic Society, c1990

形態:

viii, 733 p. ; 24 cm

シリーズ名:

Ceramic transactions ; v. 15 <BA06690812>

著者名:

ISBN:

9780944904312 [0944904319]

書誌ID:

BA11479536

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注記:	"Proceedings of the Symposium on Materials and Processes for Microelectronic Systems held during the First International Ceramic Science and Technology Congress held in Anaheim, CA, on October 31-November 3, 1989"--T.p. verso Includes index
主題:	Ceramic materials--Congresses; Integrated circuits--Design and construction--Congresses; Microelectronics--Materials--Congresses
言語:	英語

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