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Polysilicon thin films and interfaces / editors, Theodore Kamins, Bruha Raicu, Carl V. Thompson

資料種別:

図書

出版情報:

Pittsburgh, Pa. : Materials Research Society, c1990

形態:

xiii, 403 p. ; 24 cm

シリーズ名:

Materials Research Society symposium proceedings ; v. 182 <BA00013775>

著者名:

ISBN:

9781558990715 [1558990712]

書誌ID:

BA11550288

子書誌情報

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書誌詳細

注記:	Proceedings of a symposium held April 17-19, 1990, San Francisco, California Includes bibliographical references and index
主題:	Integrated circuits--Materials--Congresses; Silicon--Electric properties--Congresses; Thin film devices--Congresses

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