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Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films / edited by Steven B. Bibyk ... [et al.] ; Dielectrics and Insulation, and Electronics, and High Temperature Materials Divisions

資料種別:
図書
出版情報:
Pennington, NJ : Electrochemical Society, c1989
形態:
vii, 455 p. ; 23 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 89-7 <BA01323290>
著者名:
書誌ID:
BA11670133
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