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Ion Implantation in semiconductors, 1976 / edited by Fred Chernow and James A. Borders and David K. Brice

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図書

出版情報:

New York : Plenum Press, c1977

形態:

xiv, 754 p. ; 26 cm

著者名:

ISBN:

9780306362569 [0306362562]

書誌ID:

BA11758959

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注記:	Includes bibliographical references and index
主題:	Ion implantation--Congresses; Semiconductors--Effect of radiation on--Congresses

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