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Proceedings of the Symposium on Ion Implantation and Dielectrics for Elemental and Compound Semiconductors / edited by S.J. Pearton, K.S. Jones, V.J. Kapoor ; [sponsored by the] Electronics and Dielectric Science and Technology divisions

資料種別:
図書
出版情報:
Pennington, NJ : Electrochemical Society, c1990
形態:
viii, 472 p. ; 23 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 90-13 <BA01323290>
著者名:
Symposium on Ion Implantation and Dielectrics for Elemental and Compound Semiconductors
Pearton, S. J.
Jones, K. S.
Kapoor, Vikram J.
Electrochemical Society. Electronics Division
Electrochemical Society. Dielectrics and Insulation Division
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書誌ID:
BA1182183X
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