所蔵情報QRコード
Proceedings of the Symposium on Ion Implantation and Dielectrics for Elemental and Compound Semiconductors / edited by S.J. Pearton, K.S. Jones, V.J. Kapoor ; [sponsored by the] Electronics and Dielectric Science and Technology divisions
- 資料種別:
- 図書
- 出版情報:
- Pennington, NJ : Electrochemical Society, c1990
- 形態:
- viii, 472 p. ; 23 cm
- シリーズ名:
- Proceedings / [Electrochemical Society] ; v. 90-13 <BA01323290>
- 著者名:
- 書誌ID:
- BA1182183X
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5
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