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Proceedings, IEEE micro electro mechanical systems : an investigation of micro structures,sensors, actuators, machines, and robots : Nara, Japan, 30 January-2 February 1991 / sponsored by the IEEE Robotics and Automation Society, and incooperation with the IEE of Japan and the ASME Dynamic Systems and Control Division

資料種別:
図書
出版情報:
New York, NY : IEEE, c1991
形態:
xiv, 288 p. ; 30 cm
著者名:
ISBN:
9780879426415 [0879426411]
書誌ID:
BA11856914
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