Proceedings, IEEE micro electro mechanical systems : an investigation of micro structures,sensors, actuators, machines, and robots : Nara, Japan, 30 January-2 February 1991 | 東京工業大学附属図書館蔵書検索

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Proceedings, IEEE micro electro mechanical systems : an investigation of micro structures,sensors, actuators, machines, and robots : Nara, Japan, 30 January-2 February 1991 / sponsored by the IEEE Robotics and Automation Society, and incooperation with the IEE of Japan and the ASME Dynamic Systems and Control Division

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図書

出版情報:

New York, NY : IEEE, c1991

形態:

xiv, 288 p. ; 30 cm

著者名:

ISBN:

9780879426415 [0879426411]

書誌ID:

BA11856914

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書誌詳細

その他の標題:	Micro electro mechanical systems 91CH29579 MEMS
注記:	Papers presented at the fourth IEEE Workshop on Micro Electro Mechanical Systems "IEEE catalog number 91CH2957-9" Title on spine: IEEE micro electro mechanical systems workshop Includes bibliographical references and indexes
主題:	Electromechanical devices--Congresses; Microelectronics--Congresses; Miniature objects--Congresses; Robotics--Congresses
言語:	英語

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