Hydrogen in semiconductors

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Hydrogen in semiconductors / volume editors, Jacques I. Pankove, Noble M. Johnson

資料種別:

図書

出版情報:

Boston ; Tokyo : Academic Press, c1991-1999

形態:

2 v. ; 24 cm

シリーズ名:

Semiconductors and semimetals ; v. 34, 61 <BA00240449>

著者名:

ISBN:

9780127521343 [0127521348] ([1])
9780127521701 [0127521704] (2)

書誌ID:

BA12207349

子書誌情報

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書誌詳細

注記:

Includes bibliographical references and index
Vol.2 editor: Norbert H. Nickel

主題:

Semiconductors--Collected works; Semimetals--Collected works

言語:

英語

目次情報:

Preface

List of Contributors

Introduction to Hydrogen in Semiconductors II / Norbert H. NickelChapter 1：

Isolated Monatomic Hydrogen in Silicon / Noble M. Johnson ; Chris Van de WalleChapter 2：

Introduction / I.：

Theory / II.：

Hydrogen in the Positive Charge State: H[superscript +] / 1.：

Hydrogen in the Neutral Charge State: H[superscript 0] / 2.：

Hydrogen in the Negative Charge State: H[superscript -] / 3.：

Relative Stability of Different Charge States and Negative-U Character / 4.：

Experiment / III.：

Donor Level

Acceptor Level

Equilibrium Densities

Conclusions / IV.：

Electron Paramagnetic Resonance Studies of Hydrogen and Hydrogen-Related Defects in Crystalline Silicon / Yurij V. GorelkinskiiChapter 3：

Interstitial (BC) Hydrogen in Silicon

Experimental Procedure

EPR Spectrum of Bond-Centered Hydrogen

Stress-Induced Alignment of Bond-Centered Hydrogen

Thermally Activated Annealing

EPR of Hydrogen-Related Complexes in Silicon

Hydrogen-Intrinsic Defect Complexes

EPR of Platinum-Hydrogen and Sulphur-Hydrogen Complexes

ENDOR Spectra of Si--H Bonds at the (111) Si Surface

ENDOR of Hydrogen in the Oxygen Thermal Donor (NL10)

Hydrogen-Induced Effects in Silicon

Hydrogen-Associated Shallow Donors in Hydrogen-Implanted Silicon

Stress-Induced Alignment of the AA1 Spectrum

Neutral Charge State of Hydrogen-Associated Donor

EPR Evidence of Hydrogen-Enhanced Diffusion of Al in Silicon

Summary and Conclusions / V.：

Hydrogen in Polycrystalline Silicon / Chapter 4：

Experimental Techniques

Sample Preparation and Characterization

Hydrogen Passivation

Characterization

Hydrogen Diffusion

Hydrogen Diffusion from a Plasma Source

Hydrogen Diffusion from a Silicon Layer

Hydrogen Density of States

Hydrogen Passivation of Grain-Boundary Defects

Metastability

Light-Induced Defect Generation

Metastable Changes in the Electrical Conductivity

Hydrogen-Induced Defects During Plasma Exposure / VI.：

Generation of Acceptor-Like Defects

Platelets

Summary and Future Directions / VII.：

Hydrogen Phenomena in Hydrogenated Amorphous Silicon / Wolfhard BeyerChapter 5：

Material Characterization by Hydrogen Effusion and Infrared Absorption

Measurement Techniques and Material Preparation

Hydrogen Effusion Data

Infrared Absorption Data

Experimental Hydrogen Diffusion and Solubility Data

Hydrogen Diffusion Data

Hydrogen Solubility Data

Hydrogen Diffusion and Effusion Effects

Hydrogen Diffusion Processes

Hydrogen Density of States Distribution and Hydrogen Chemical Potential

Temperature Shift of Hydrogen Chemical Potential and Meyer-Neldel Rule of Hydrogen Diffusion

Time Dependence of Hydrogen Diffusion Coefficient

Deviations from Error-Function Diffusion Profiles / 5.：

Plasma In-Diffusion Versus Layer Diffusion / 6.：

Relation Between SIMS Diffusion Data and Hydrogen Effusion Data / 7.：

Interrelation Between IR Absorption Spectra and Effusion Transients / 8.：

Hydrogen Solubility Effects

Solubility in Compact Material

Hydrogen-Related Void Formation

Hydrogen Interactions with Polycrystalline and Amorphous Silicon--Theory / Chris G. Van de WalleChapter 6：

Role of Hydrogen in Amorphous and Polycrystalline Silicon

General Features of Hydrogen in Silicon

Computational Approaches

Hydrogen Interactions With Amorphous Silicon

Hydrogen Motion - Introduction

Hydrogen Interactions with Dangling Bonds

Hydrogen Interactions with Overcoordination Defects

Hydrogen Interactions with Weak Si--Si Bonds

Simulations of Amorphous Networks

Hydrogen Diffusion and Metastability - Discussion

Hydrogen Versus Deuterium for Passivation of Dangling Bonds

Grain Boundaries

Hydrogen Interactions with Grain Boundaries

Hydrogen-Induced Generation of Donor-Like Metastable Defects

Hydrogen-Induced Generation of Acceptor-Like Defects

Conclusions and Future Directions

Hydrogen in Polycrystalline CVD Diamond / Karen M. McNamara RutledgeChapter 7：

Solid-State Characterization Techniques

Fourier Transform Spectroscopy

Nuclear Magnetic Resonance

Electron Paramagnetic Resonance

Other Analysis Techniques

Results of Solid-State Analysis

Covalent Bonding Environments

Quantitative Hydrogen Concentrations

Local Hydrogen Distribution

Proximity to Paramagnetic Defects

Macroscopic Hydrogen Distributions

Effects of Hydrogen on Observed Properties

Infrared Transmission

Thermal Conductivity

Summary

Dynamics of Muonium Diffusion, Site Changes and Charge-State Transitions / Roger L. LichtiChapter 8：

Transverse-Field Methods

Longitudinal-Field Methods

Identification and Characterization of Muonium States

Neutral Paramagnetic Centers

Charged Diamagnetic Centers

Dynamics of Muonium Transitions

Silicon: The Basic Model

Germanium

Gallium Arsenide

Other III-V Materials

Relevance to Hydrogen Impurities

Hydrogen in III-V and II-VI Semiconductors / Matthew D. McCluskey ; Eugene E. HallerChapter 9：

Hydrogen in III-V Semiconductors

Hydrogen in GaAs

Hydrogen in AlAs

Hydrogen in InP

Hydrogen in GaP

Hydrogen in AlSb

Hydrogen in GaN

Hydrogen in Other III-V Semiconductors

Hydrogen in II-VI Semiconductors

Hydrogen in ZnSe

Hydrogen in CdTe

Summary and Future Discussion

The Properties of Hydrogen in GaN and Related Alloys / S. J. Pearton ; J. W. LeeChapter 10：

Hydrogen in As-Grown Nitrides

Doped Material

Sources of Hydrogen

Diffusion

Dopant Passivation

Calcium

Carbon

Diffusion and Reactivation Mechanism

Alloys

In-Containing Nitrides

Mechanisms

Heterostructures

Role of Hydrogen During Processing

Implant Isolation

Wet Processing

Deposition and Etching

Theory of Hydrogen in Nitrides

Theory of Hydrogen in GaN / Jorg NeugebauerChapter 11：

Method

Defect Concentrations and Solubility

Energetics, Atomic Geometries, and Electronic Structure

Monatomic Hydrogen in GaN

Atomic Geometries and Stable Positions

Migration Path and Diffusion Barriers

Formation Energies and Negative-U Effect

Hydrogen Molecules in GaN

Hydrogen-Acceptor Complexes in GaN

The Mg-H Complex

Other H-Acceptor Complexes

Complexes of H With Native Defects

Hydrogen Interacting with Nitrogen Vacancies

Hydrogen Interacting with Gallium Vacancies

Role of Hydrogen in Doping GaN

Doping in the Absence of Hydrogen

Doping in the Presence of Hydrogen

Activation Mechanism of the Dopants

General Criteria for Hydrogen to Enhance Doping / VIII.：

Conclusions and Outlook / IX.：

Index

Contents of Volumes in This Series

Hydrogenation Methods / J.I. Pankove ; N.M. Johnson ; C.H. Seager

Hydrogenation of Defects in Crystalline Silicon

Hydrogen Passivation of Damage Centers in Semiconductors / J.W. Corbett ; P. De*abak ; U.V. Desnica ; S.J. Pearton

Neutralization of Deep Levels in Silicon

Neutralization of Shallow Acceptors in Silicon

Neutralization of Donor Dopants and Formation of Hydrogen-Induced Defects in n-type Silicon

Vibrational Spectroscopy of Hydrogen-Related Defects in Silicon / M. Stavola

Hydrogen in Semiconductors: Ion Beam Techniques / A.D. Marwick

Hydrogen Migration and Solubility in Silicon / C. Herring

Hydrogen-Related Phenomena in Crystalline Germanium / E.E. Haller

Hydrogen Diffusion in Amorphous Silicon / J. Kakalios

Neutralization of Defects and Dopants in III*b1V Semiconductors / J. Chevallier ; B. Clerjaud ; B. Pajot

Computational Studies of Hydrogen-Containing Complexes in Semiconductors / G.G. DeLeo ; W.B. Fowler

Muonium in Semiconductors / R.F. Kiefl ; T.L. Estle

Theory of Isolated Interstitial Hydrogen and Muonium in Crystalline Semiconductors / C.G. Van de Walle

Each chapter includes references

Preface

List of Contributors

Introduction to Hydrogen in Semiconductors II / Norbert H. NickelChapter 1：

Isolated Monatomic Hydrogen in Silicon / Noble M. Johnson ; Chris Van de WalleChapter 2：

Introduction / I.：

Theory / II.：

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