IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '90 proceedings, September 11-12, l990, Danvers, Massachusetts

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IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '90 proceedings, September 11-12, l990, Danvers, Massachusetts / IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International

資料種別:

図書

出版情報:

New York, NY, U.S.A. : Institute of Electrical and Electronics Engineers
Piscataway, NJ, USA : Additional copies may be purchased from IEEE Service Center, c1990

形態:

x, 164 p. ; 28 cm

著者名:

書誌ID:

BA12275768

子書誌情報

フルテキスト

所蔵情報

他の版・巻

書誌詳細

その他の標題:	90CH29025
注記:	"Theme: 'World-class manufacturing'" Includes bibliographical references "IEEE catalog number 90CH2902-5"--T.p. verso
主題:	Computer integrated manufacturing systems--Congresses; Electronic industries--Congresses; Semiconductors--Design and construction--Congresses
言語:	英語

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