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Tungsten and other advanced metals for ULSI applications 1990 : proceedings of the 1990 workshop held October 22-24, 1990, Dallas, Texas, U.S.A. / sponsored by Continuing Education in Engineering, University Extension, University of Calfornia, Berkeley, and Texas Instrumets, Inc., Dallas, Texas ; editors: Gregory C. Smith, Roc Blumenthal ; associate editors: Carol M. McConica ... [et al.]

資料種別:
図書
出版情報:
Pittsburgh, Pa : Materials Research Society, c1991
形態:
xiii, 397 p. ; 24 cm
著者名:
ISBN:
9781558991125 [1558991123]
書誌ID:
BA12410604
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