Advances in resist technology and processing IV : 2-3 March 1987, Santa Clara, California / Murrae J. Bowden, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
- 資料種別:
- 図書
- 出版情報:
- Bellingham, Wash., USA : SPIE, c1987
- 形態:
- vi, 367 p. ; 28 cm
- シリーズ名:
- Proceedings / SPIE -- the International Society for Optical Engineering ; v. 771 <BA0022700X>
- 著者名:
- ISBN:
- 9780892528066 [0892528060] (pbk.)
- 書誌ID:
- BA12853627
類似資料:
International Society for Optical Engineering | |
2
図書
Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California (pbk.)
SPIE--the International Society for Optical Engineering | |
3
図書
Advances in resist technology and processing III : 10-11 March 1986, Santa Clara, California (pbk.)
SPIE--the International Society for Optical Engineering | |
S.P.I.E.-- International Society for Optical Engineering | |