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IEEE/SEMI International Semiconductor Manufacturing Science Symposium, May 19-22, 1991, Burlingame, CA USA / IEEE/SEMI International Semiconductor Manufacturing Science Symposium ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International

資料種別:
図書
出版情報:
New York, NY, U.S.A. : Institute of Electrical and Electronics Engineers
Piscataway, NJ, USA : Additional copies may be purchased from IEEE Service Center, c1991
形態:
x, 164 p. ; 28 cm
著者名:
ISBN:
9780780300279 [0780300270] (: soft.)
9780780300286 [0780300289] (: case.)
9780780300293 [0780300297] (: micro.)
書誌ID:
BA12894566
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