Integrated circuit metrology, inspection, and process control , 4-6 March 1987, Santa Clara, California /Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

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Integrated circuit metrology, inspection, and process control , 4-6 March 1987, Santa Clara, California /Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering / Monahan, Kevin M. ; Society of Photo-optical Instrumentation Engineers

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1987

形態:

vi, 329 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 775 <BA0022700X>

著者名:

ISBN:

9780892528103 [0892528109] (pbk.)

書誌ID:

BA1312222X

子書誌情報

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書誌詳細

注記:	Includes bibliographical references and index
主題:	Integrated circuits--Inspection--Congresses
言語:	英語

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