Electron-beam, x-ray, and ion-beam lithographies VI : [proceedings] 5-6 March 1987, Santa Clara, California / Phillip D. Blais, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
- 資料種別:
- 図書
- 出版情報:
- Bellingham, Wash., USA : The Society, c1987
- 形態:
- vi, 265 p. ; 28 cm
- シリーズ名:
- Proceedings / SPIE -- the International Society for Optical Engineering ; v. 773 <BA0022700X>
- 著者名:
- ISBN:
- 9780892528080 [0892528087] (pbk.)
- 書誌ID:
- BA13293696
類似資料:
SPIE--the International Society for Optical Engineering | |
SPIE--the International Society for Optical Engineering | |
S.P.I.E.-- International Society for Optical Engineering | |