Electron-beam, x-ray, and ion-beam lithographies VI : [proceedings] 5-6 March 1987, Santa Clara, California | 東京工業大学附属図書館蔵書検索

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Electron-beam, x-ray, and ion-beam lithographies VI : [proceedings] 5-6 March 1987, Santa Clara, California / Phillip D. Blais, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash., USA : The Society, c1987

形態:

vi, 265 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 773 <BA0022700X>

著者名:

ISBN:

9780892528080 [0892528087] (pbk.)

書誌ID:

BA13293696

子書誌情報

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書誌詳細

注記:	Includes bibliographies and index
主題:	Ion beam lithography--Congresses; Lithography, Electron beam--Congresses; X-ray lithography--Congresses
言語:	英語

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