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ULSI science and technology/1991 : proceedings of the Third International Symposium on Ultra Large Scale Integration Science and Technology / edited by John M. Andrews, George K. Celler ; Electronics and Dielectric Science and Technology Divisions

資料種別:
図書
出版情報:
Pennington, N.J. : Electrochemical Society, c1991
形態:
xv, 924 p. ; 23 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 91-11 <BA01323290>
著者名:
書誌ID:
BA13357380
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