IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '91 proceedings, October 21-23, 1991, Boston, Massachusetts

所蔵情報QRコード

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '91 proceedings, October 21-23, 1991, Boston, Massachusetts / IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International

資料種別:

図書

出版情報:

New York, NY, U.S.A. : Institute of Electrical and Electronics Engineers
Piscataway, NJ, USA : Additional copies may be purchased from IEEE Service Center, c1991

形態:

x, 212 p. ; 28 cm

著者名:

ISBN:

9780780301528 [0780301528] (: soft.)
9780780301535 [0780301536] (: case.)
9780780301542 [0780301544] (: micro.)

書誌ID:

BA13832699

子書誌情報

フルテキスト

所蔵情報

他の版・巻

書誌詳細

その他の標題:	91CH30429
注記:	"sponsored by: Semiconductor Equipment and Materials International, Institute of Electrical and Electronics Engineers, Inc.(IEEE), IEEE Electron Devices Society, IEEE Components, Hybrids and Manufacturing Technology Society"--cover Includes bibliographical references "IEEE catalog number 91CH3042-9"--T.p. verso
主題:	Computer integrated manufacturing systems--Congresses; Electronic industries--Congresses; Semiconductors--Design and construction--Congresses
言語:	英語

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