Advanced metallization for ULSI applications (formerly workshop on tungsten and other advanced metals for ULSI applications) : proceedings of the conference held October 8-10, 1991, at AT&T Bell Laboratories, Murray Hill, New Jersey, U.S.A., and October 28-30, 1991, Tokyo, Japan / sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. ; editors: Virendra V.S. Rana, Rajiv V. Joshi, Iwao Ohdomari ; associate editors, Robert S. Blewer ... [et al.]

資料種別:

図書

出版情報:

Pittsburgh, Pa : Materials Research Society, c1992

形態:

xv, 580 p. ; 24 cm

シリーズ名:

Materials Research Society conference proceedings <BA07468230>

著者名:

• Rana, Virendra Vir Singh <DA06902338>
• Joshi, Rajiv V. <DA06902429>
• 大泊, 巌 <DA04850889>
• University of California, Berkeley. Continuing Education in Engineering <DA03481732>
• Advanced Metallization for ULSI Applications Conference <DA06902509>

ISBN:

9781558991521 [1558991522]

書誌ID:

BA14203167