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Proceedings of the Symposia on Patterning Science and Technology II . Interconnection and Contact Metallization for ULSI / edited by Wayne Greene, George J. Hefferon, L.K. White . edited by Terry O. Herndon, Andrew L. Wu

資料種別:
図書
出版情報:
Pennington, NJ : Electrochemical Society, c1992
形態:
x, 382 p. ; 23 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 92-6 <BA01323290>
著者名:
International Symposium on Patterning Science and Technology <DA0642176X>
Greene, Wayne, 1965- <DA06421704>
Hefferon, George J. <DA06421715>
White, L. K. <DA06421726>
Herndon, Terry O.
Wu, Andrew L.
Electrochemical Society. Dielectric Science and Technology Division <DA06421624>
Electrochemical Society. Electronics Division
さらに 3 件
ISBN:
9781566770071 [1566770076]
書誌ID:
BA14411867
子書誌情報
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